New Source Heterojunction Structures with Relaxed-/Strained-Semiconductors for Quasi-Ballistic Complementary-Metal-Oxide-Semiconductor(CMOS) Transistors : Relaxation Technique of Strained-Substrates and Design of Sub-10nm Devices
New Source Heterojunction Structures with Relaxed-/Strained-Semiconductors for Quasi-Ballistic Complementary-Metal-Oxide-Semiconductor(CMOS) Transistors : Relaxation Technique of Strained-Substrates and Design of Sub-10nm Devices
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用于准弹道互补金属氧化物半导体(CMOS)晶体管的具有松弛/应变半导体的新型源异质结结构:应变衬底的松弛技术和亚10nm器件的设计
DOI:
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发表时间:
2010
期刊:
影响因子:
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通讯作者:
and T. Tezuka
中科院分区:
文献类型:
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作者:
Yamauchi;M. Hasegawa;T. Sameshima;and T. Tezuka