Nonlinear compensation for pneumatic actuators with hysteresis - precision control for microlithography
Nonlinear compensation for pneumatic actuators with hysteresis - precision control for microlithography
复制标题
带滞后的气动执行器的非线性补偿 - 微光刻的精密控制
DOI：
10.1109/mcs.2005.1550151
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发表时间：
2005
期刊：
影响因子：
--
通讯作者：
W. A. Cebuhar
中科院分区：
文献类型：
--
作者：
Roberto B. Wiener;W. A. Cebuhar
本文介绍了一种迟滞补偿方法，以满足严格的规格所施加的精密定位的光学元件的微光刻工具。针对具有滞回特性的系统，介绍了新颖有效的实现技术。通过固定用于致动器响应的非线性分量的曲线拟合的阶数、限制用于估计磁滞回线的算子的数量以及仅改变斜率/spl α/，简化了算法的实时实现。使用LabView开发了一种能够在几分之一秒内准确定位多达36个致动器的控制器。
The article describes a hysteresis compensation method developed to meet stringent specifications imposed by the precision positioning of optical elements in microlithography tools. Novel and effective implementation techniques are introduced for systems possessing hysteretic behavior. The real-time implementation of the algorithm was simplified by fixing the order of the curve fit for the nonlinear component of the actuator response, limiting the number of operators used to estimate the hysteresis loop, and varying only the slope /spl alpha/. Using LabView, a controller capable of accurately positioning up to 36 actuators within a fraction of a second is developed.