A Miniature Fuel Cell with Porous Pt Layer Formed on a Si Substrate
A Miniature Fuel Cell with Porous Pt Layer Formed on a Si Substrate
复制标题
DOI：
10.1149/1.3545070
复制
发表时间：
2011-04
影响因子：
3.9
通讯作者：
M. Hayase;T. Fujii;J. G. A. Brito-Neto
中科院分区：
文献类型：
--
作者：
M. Hayase;T. Fujii;J. G. A. Brito-Neto
提出了一种新型的硅电极单片微型燃料电池。我们最近发现，用含HF的镀铂液浸渍多孔硅，可以在硅衬底上均匀地形成多孔铂层。为了利用多孔Pt作为催化剂层，我们探索了多孔Pt形成的条件。在Si晶片上形成多孔Pt催化剂层之后，通过从Si晶片的相对侧施加干法蚀刻直到蚀刻到达多孔层来打开燃料通道。多孔Pt层可用作干蚀刻的停止层，并且获得贯穿芯片的多孔层。将两个这样的Si电极热压到聚合物电解质膜的两侧，并构造230 μm厚的原型电池。通过向阳极和阴极侧分别供给H2和O2，我们获得了峰值功率密度为145 mW/cm 2的发电。
A novel miniature fuel cell is proposed with monolithically fabricated Si electrodes. We recently discovered that a porous Pt layer can be formed uniformly on Si substrate by immersing porous Si into a Pt plating bath containing HF. To exploit the porous Pt as a catalyst layer, we explored the conditions for porous Pt formation. After formation of the porous Pt catalyst layer on a Si wafer, fuel channels were opened by applying dry etching from the opposite side of the Si wafer until the etching had reached to the porous layer. The porous Pt layer could be used as a stopping layer for the dry etching, and a through-chip porous layer was obtained. Two such Si electrodes were hot-pressed onto either side of a polymer electrolyte membrane, and 230 μm thick prototype cells were constructed. By feeding H 2 and O 2 to the anode and cathode side, respectively, we obtained power generation at a peak power density of 145 mW/cm 2.