Influences of probe geometry and experimental errors on spatial resolution of surface charge measurement with electrostatic probe
Influences of probe geometry and experimental errors on spatial resolution of surface charge measurement with electrostatic probe
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DOI：
10.1109/tdei.2005.1561797
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发表时间：
2005-12
影响因子：
3.1
通讯作者：
A. Kumada;S. Okabe;K. Hidaka
中科院分区：
文献类型：
--
作者：
A. Kumada;S. Okabe;K. Hidaka
当用静电探针测量等厚绝缘板或长绝缘管上的表面电荷时，将测量系统的结构视为平移不变，通过傅立叶分析，可在空间频率域处理表面电荷密度与探针输出之间的关系。在从探针输出到电荷分布的逆计算中，维纳滤波器技术被有效地用于抑制噪声的过度放大。通过对空间频域传递特性的分析，定量讨论了探头几何形状和实验误差对整个测量系统空间分辨率的影响，包括维纳滤波器的恢复过程。
When an electrostatic probe is used for surface charge measurement on an insulating plate with constant thickness or a long insulating pipe, the configuration of the measuring system is regarded as shift-invariant and the relation between the surface charge density and the probe output can be treated in the spatial frequency domain through Fourier analysis. In the inverse calculation from the probe output to the charge distribution, a Wiener-filter technique is effectively used to suppress the excessive amplification of the noise. Influences of the probe geometry and experimental errors on the spatial resolution of the total measuring system, including the restoration process with the Wiener filter, are quantitatively discussed through the analysis of transfer characteristics in the spatial frequency domain.