Improvement of oxygen barrier of polyethylene terepthalate film by plasma-source ion implantation of carbon
Improvement of oxygen barrier of polyethylene terepthalate film by plasma-source ion implantation of carbon
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等离子体源离子注入碳提高聚对苯二甲酸乙二醇酯薄膜的氧阻隔性
DOI：
10.1116/1.1503785
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发表时间：
2002
期刊：
影响因子：
--
通讯作者：
T. Takagi
中科院分区：
文献类型：
--
作者：
M. Yoshida;T. Tanaka;M. Shinohara;S. Watanabe;J. W. Lee;T. Takagi
采用等离子体源离子注入（PSII）技术对聚对苯二甲酸乙二酯（PET）薄膜表面进行无定形碳改性，以提高PET薄膜的阻氧性能。该过程是使用高负脉冲电压在射频场与C2 H2气体。发现无定形碳层主要由具有C-H、C-H2和C-H3组分的石墨晶体组成，并且在仅70-300 nm的厚度下使膜的氧气透过率降低高达未改性PET膜的100倍。拉曼光谱表明，非晶碳层具有类金刚石碳特征，但与氢含量>20 at. %的其他类金刚石碳膜相比是软的。一个更强的石墨字符中的X-射线光电子能谱被发现代表的碳结构的精细度和相关性以及与氧气阻隔特性的改善。
The surface of polyethylene terepthalate (PET) film has been successfully modified to amorphous carbon by plasma source ion implantation (PSII) as a means of improving the oxygen barrier characteristics of the PET film. The process was performed using high negative pulsed voltage in an radio frequency field with C2H2 gas. The amorphous carbon layer is found to consist primarily of graphite crystal with C–H, C–H2 and C–H3 components, and to reduce the oxygen transmission rate of the film by up to 100 times that of unmodified PET film at a thickness of only 70–300 nm. Raman spectra reveal that the amorphous carbon layer has diamond-like carbon characteristics, yet is soft compared to other diamond-like carbon films with hydrogen contents of >20 at. %. A stronger graphite character in the x-ray photoelectron spectroscopy spectra is found to represent the fineness of the carbon structure and correlate well with the improvement of oxygen barrier characteristics.