Hydrogen incorporation into metal deposits forming from tungsten or stainless steel by sputtering under mixed hydrogen and argon plasma at elevated temperature
Hydrogen incorporation into metal deposits forming from tungsten or stainless steel by sputtering under mixed hydrogen and argon plasma at elevated temperature
复制标题
通过在高温下氢和氩混合等离子体下溅射，将氢掺入由钨或不锈钢形成的金属沉积物中
DOI：
10.1016/j.jnucmat.2013.01.220
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发表时间：
2013
影响因子：
3.1
通讯作者：
Kazunari Katayama
中科院分区：
文献类型：
--
作者：
H.Nakaya;et al.;Kazunari Katayama
通过将钨（W）或不锈钢（SS）暴露于混合氢和氩等离子体中，研究了沉积条件对金属沉积物中氢结合的影响。SS的溅射产率低于从铁的溅射产率所预期的，并且接近于Mo的溅射产率。结合到W沉积物中的氢通过加热至600°C而释放。另一方面，氢从SS沉积物中的释放持续到1000°C。沉积层中的H/W比随着朝向生长表面的H/W流量比的减小和衬底温度的升高而减小。在500°C下形成的W存款中的H/W比为0.005。SS沉积物中的H/金属比在0.03和0.3之间的范围内变化，这取决于靶偏压，但是没有观察到H/金属通量比和衬底温度的影响。
The influence of the deposition conditions on hydrogen incorporation into metal deposits was investigated by exposing tungsten (W) or stainless steel (SS) to mixed hydrogen and argon plasma. The sputtering yield of SS was lower than expected from a sputtering yield of iron and was close to that of Mo. The hydrogen incorporated into the W deposits was released by heating up to 600°C. On the other hand, the release of hydrogen from the SS deposits continued until 1000°C. The H/W ratio in the W deposits decreased with decreasing the H/W flux ratio toward the growing surface and increasing substrate temperature. The H/W ratio in the W deposit formed at 500°C was 0.005. The H/Metal ratio in the SS deposits was varied in the range between 0.03 and 0.3 depending on the target bias but the influences of the H/Metal flux ratio and substrate temperature were not observed.