Cluster imaging with a direct detection CMOS pixel sensor in Transmission Electron Microscopy
Cluster imaging with a direct detection CMOS pixel sensor in Transmission Electron Microscopy
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DOI:
10.1016/j.nima.2009.07.017
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发表时间:
2009-09-11
影响因子:
1.4
通讯作者:
Giubilato, Piero
中科院分区:
文献类型:
--
作者:
Battaglia, Marco;Contarato, Devis;Giubilato, Piero
A cluster imaging technique for Transmission Electron Microscopy with a direct detection CMOS pixel sensor is presented. Charge centre-of-gravity reconstruction for individual electron clusters improves the spatial resolution and thus the point spread function. Data collected with a CIVICS sensor with 9.5 x 9.5 mu m(2) pixels show an improvement of a factor of two in point spread function to 2.7 mu m at 300 keV and of a factor of three in the image contrast, compared to traditional bright field illumination. (C) 2009 Elsevier B.V. All rights reserved.