Note: Automated maskless micro-multidomain photoalignment
Note: Automated maskless micro-multidomain photoalignment
复制标题
DOI：
10.1063/1.3669528
复制
发表时间：
2011-12-01
影响因子：
1.6
通讯作者：
Yokoyama, Hiroshi
中科院分区：
文献类型：
--
作者：
Culbreath, Christopher;Glazar, Nikolaus;Yokoyama, Hiroshi
我们提出了一种全自动无掩模曝光系统，用于制造微观定向表面排列图案。无掩模系统允许我们在2 mm x 2 mm的面积上制作任意表面图案，分辨率为2.2微米。共焦自动对焦系统确保了准确和可重复的对焦。微观取向表面图案已被证明具有多种新的功能，例如表面取向的多稳定性。(C)2011年美国物理研究所。[DOI：10.1063/1.3669528]
We present a fully automated maskless exposure system for the fabrication of microscopic orientational surface alignment patterns. The maskless system allows us to fabricate arbitrary surface patterns over a 2 mm x 2 mm area with a resolution of 2.2 mu m. A confocal autofocus system insures accurate and repeatable focus. Microscopic orientational surface patterns have been demonstrated to exhibit a variety of novel functionalities, such as surface alignment multi-stability. (C) 2011 American Institute of Physics. [doi:10.1063/1.3669528]