Curvature estimation for multilayer hinged structures with initial strains

Curvature estimation for multilayer hinged structures with initial strains
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DOI:
10.1063/1.1610777
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发表时间:
2003-10-15
影响因子:
3.2
通讯作者:
Nikishkov, GP
Nikishkov, GP
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Nikishkov, GP

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给出了具有初始应变的铰接多层结构的曲率的闭合估计。采用有限元方法对自定位微结构进行建模。采用带节点坐标更新的步进法求解大转角、大位移的几何非线性问题。对变宽度铰链微镜的曲率进行了有限元计算,并与闭合计算结果进行了比较。(C)2003年美国物理研究所。
Closed-form estimate of curvature for hinged multilayer structures with initial strains is developed. The finite element method is used for modeling of self-positioning microstructures. The geometrically nonlinear problem with large rotations and large displacements is solved using step procedure with node coordinate update. Finite element results for curvature of the hinged micromirror with variable width is compared to closed-form estimates. (C) 2003 American Institute of Physics.