Force characterization and analysis of thin film actuators for untethered microdevices
Force characterization and analysis of thin film actuators for untethered microdevices
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DOI：
10.1063/1.5088779
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发表时间：
2019-05-01
期刊：
影响因子：
1.6
通讯作者：
Misra, Sarthak
中科院分区：
文献类型：
--
作者：
Ongaro, Federico;Jin, Qianru;Misra, Sarthak
近年来，无栓系的微型装置由于其小尺寸、重量和其在不需要线或栓系件的情况下施加力的能力而引起显著关注。这种微型器件与可植入生物医学器件、微型机器人、微创手术和微机电系统有关。虽然使用这些致动器的装置已被广泛用于拾取和放置以及活检应用中，但是由这些致动器施加的力尚未被表征和分析。缺乏精确的力测量和有效的模型阻碍了这种薄膜显微手术装置的临床适用性和安全性。此外，针对目标应用的薄膜微器件的当前设计需要迭代试错过程。为了解决这些问题，我们提出了一种新的技术来测量薄膜微致动器的力输出。此外，我们开发和制造三种设计的残余应力微致动器，并使用它们来验证这种技术，并建立性能和设计参数之间的关系。特别是，我们发现的致动器的厚度和它的力输出，与70 nm，115 nm和200 nm的致动器施加7.8 μ N，4.7 μ N，和2.7 μ N，分别成反比。除了这些发现，我们预计，这种微系统测量方法可用于替代微执行器，包括形状记忆，压电和电磁执行器的力测量。(c)2019年作者。
In recent years, untethered microdevices have drawn significant attention due to their small size, weight and their ability to exert forces without the need for wires or tethers. Such microdevices are relevant to implantable biomedical devices, miniature robotics, minimally invasive surgery, and microelectromechanical systems. While devices using these actuators have been widely utilized in pick-and-place and biopsy applications, the forces exerted by these actuators have yet to be characterized and analyzed. Lack of precise force measurements and validated models impedes the clinical applicability and safety of such thin film microsurgical devices. Furthermore, present-day design of thin film microdevices for targeted applications requires an iterative trial-and-error process. In order to address these issues, we present a novel technique to measure the force output of thin film microactuators. Also, we develop and fabricate three designs of residual stress microactuators and use them to validate this technique, and establish a relationship between performance and design parameters. In particular, we find an inverse dependence of the thickness of the actuator and its force output, with 70 nm, 115 nm and 200 nm actuators exerting 7.8 mu N, 4.7 mu N, and 2.7 mu N, respectively. Besides these findings, we anticipate that this microsystem measurement approach could be used for force measurements on alternate microactuators including shape memory, piezo and electromagnetic actuators. (c) 2019 Author(s).