Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy
Adsorption of hydrocarbon components generated in deuterated benzene plasma studied by in situ real-time infrared absorption spectroscopy
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DOI：
10.7567/jjap.53.096202
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发表时间：
2014-08
影响因子：
1.5
通讯作者：
M. Shinohara;Yujiro Taniguchi;Y. Takaki;Y. Matsuda;H. Fujiyama
中科院分区：
文献类型：
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作者：
M. Shinohara;Yujiro Taniguchi;Y. Takaki;Y. Matsuda;H. Fujiyama
在现场，实时红外吸收光谱的多次内反射几何形状，调查的演变过程中沉积的烃类组分的等离子体增强化学气相沉积与氘代苯源。我们检测到一个峰归因于氘代苯基的C-D伸缩振动，这表明在吸附过程中苯环结构保留在基底上的模式。在等离子体暴露期间每个峰的演变表明在吸附期间发生加成反应。此外，我们观察到，随着衬底偏压的增加，薄膜中的苯环结构被破坏，烷烃组分的量增加。该加成反应在膜表面上进行，与衬底偏压无关。
In situ, real-time infrared absorption spectroscopy in the multiple internal reflection geometry was employed to investigate the evolution of hydrocarbon components deposited during plasma-enhanced chemical vapor deposition with a deuterated benzene source. We detected a peak attributed to the C–D stretching vibration of the deuterated phenyl group, which indicated a mode in which the benzene ring structure is retained on the substrate during the adsorption. The evolution of each peak during the plasma exposure suggests that the addition reaction occurs during the adsorption. Furthermore, we observed that with increasing substrate bias applied, the benzene ring structures in the film were disrupted and the amount of alkane components increased. This addition reaction proceeded on the film surface, regardless of the substrate bias.