Surface modification of graphite and ceramics with metals using induction heating
Surface modification of graphite and ceramics with metals using induction heating
复制标题
使用感应加热对石墨和陶瓷进行金属表面改性
DOI：
10.1088/1757-899x/61/1/012025
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发表时间：
2014
期刊：
影响因子：
--
通讯作者：
Masahiro Sakamoto and Satoshi Sakimichi
中科院分区：
文献类型：
--
作者：
Toshi-Taka Ikeshoji;Akiko Imoto;Akio Suzumura;and Mana Katori;Takahisa Yamazaki;Masahiro Sakamoto and Satoshi Sakimichi
为了实现金属与石墨、陶瓷的钎焊连接，提出了一种感应加热石墨、陶瓷表面改性的新方法。采用真空感应加热的方法，在沉积基底或靶基底上沉积了Cu、Ni、Cr等金属源，并在石墨、AlN、Si3N4等金属源上沉积了薄膜。通过扫描电镜观察、俄歇电子能谱分析、X射线衍射分析和电子探针分析等手段对沉积层进行了分析。通过比较沉积过程中的环境真空压力和源金属的饱和vaopr压力，该方法被认为是利用升华现象。
In order to join metals to graphite or ceramics by soldering or brazing, a new surface modification method using induction heating was developed for graphite and ceramics. Such source metals as Cu, Ni, Cr, etc. were induction-heated in vacuum atmosphere and making deposited films on the deposition substrate, or the target substrate; graphite, AlN, Si 3 N 4. The applicability of this method was investigated and the deposited layer was analysed by SEM observation, Auger electron spectrum analysis, X-ray diffractometry, and EPMA. By comparison of ambient vacuum pressure during deposition and the saturated vaopr pressure of source metals, this method was considered to utilize the sublimation phenomenon.