Efficient catalytic combustion in integrated micropellistors
Efficient catalytic combustion in integrated micropellistors
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DOI：
10.1088/0957-0233/20/12/124009
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发表时间：
2009-12
影响因子：
2.4
通讯作者：
I. Bársony;M. Ádám;P. Fürjes;R. Lucklum;M. Hirschfelder;S. Kulinyi;C. Dücso
中科院分区：
文献类型：
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作者：
I. Bársony;M. Ádám;P. Fürjes;R. Lucklum;M. Hirschfelder;S. Kulinyi;C. Dücso
本文分析了催化燃烧型传感器发展的两个关键问题：微催化器表面活性催化颗粒的选择和生产以及加热元件和催化表面之间实现可靠的热传导，以传感燃烧产生的温度升高。该报告还表明，通过 MEMS 工艺开发化学传感器产品需要不断努力，以消除影响最终产品可靠性和灵敏度的所有不确定性。
This paper analyses two of the key issues of the development of catalytic combustion-type sensors: the selection and production of active catalytic particles on the micropellistor surface as well as the realization of a reliable thermal conduction between heater element and catalytic surface, for the sensing of temperature increase produced by the combustion. The report also demonstrates that chemical sensor product development by a MEMS process is a continuous struggle for elimination of all uncertainties influencing reliability and sensitivity of the final product.