Structural stability of indium oxide films deposited by spray pyrolysis during thermal annealing
Structural stability of indium oxide films deposited by spray pyrolysis during thermal annealing
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DOI：
10.1016/j.tsf.2004.11.107
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发表时间：
2005-05-23
期刊：
影响因子：
2.1
通讯作者：
Morante, J
中科院分区：
文献类型：
--
作者：
Korotcenkov, G;Brinzari, V;Morante, J
本文介绍了在500 ~ 1100℃温度范围内对In2O3薄膜进行热退火时性能稳定性的分析结果。以0.2 M的incl3 -水溶液为原料，采用喷雾热解法制备了In2O3薄膜。退火是在正常空气气氛中进行的。薄膜形貌、晶粒尺寸、结构、阴极发光强度和拉曼散射等参数的变化都得到了控制。对于测试薄膜的结构分析，我们使用了x射线衍射，扫描电子显微镜和原子力显微镜技术。结果表明：含氧气氛热处理过程中In2O3薄膜结构的变化经历了多晶材料结构转变的四个标准阶段：薄膜结构稳定阶段（25 ~ 500℃）；颗粒聚并形成团块的阶段（500 ~ 700℃）；局部结构重建阶段（700-1000℃）；全球（综合）结构重建阶段（> ~ 1000℃）。讨论了晶粒尺寸（10 ~ 60nm）、膜厚（20 ~ 400nm）和沉积参数（T-pyr = 390 ~ 520℃）对In2O3薄膜结构稳定性的影响。(c) 2004 Elsevier B.V.版权所有
The results of the analysis of In2O3 film properties' stability during thermal annealing in the temperature range from 500 to 1100 degrees C are presented in this article. In2O3 films were deposited by spray pyrolysis from 0.2 M InCl3-water solution. Annealing was carried out in the atmosphere of usual air. The change of parameters, such as film morphology, grain size, texture, intensity of cathodoluminescence, and Raman scattering, was controlled. For structural analysis of tested films, we used X-ray diffraction, scanning electron microscopy, and Atomic force microscopy techniques. It was determined that the change of In2O3 film structure during thermal treatment in oxygen-containing atmosphere goes through the following four standard stages of structure transformation of polycrystalline materials: the stage of structural stability of the film (25-500 degrees C); the stage of coalescence of grains forming agglomerates (500-700 degrees C); the stage of local structural reconstruction (700-1000 degrees C); and the stage of global (comprehensive) structural reconstruction (> 1000 degrees C). The influence of grain size (10-60 nm), film thickness (20-400 nm), and deposition parameters (T-pyr = 390-520 degrees C) on structural stability of In2O3 films is discussed as well. (c) 2004 Elsevier B.V. All rights reserved.