Novel Monomers with Degradable Property and Their Applications to UV Imprint Lithography
Novel Monomers with Degradable Property and Their Applications to UV Imprint Lithography
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新型可降解单体及其在紫外压印光刻中的应用
DOI:
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发表时间:
2011
期刊:
影响因子:
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通讯作者:
M. Shirai
中科院分区:
文献类型:
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作者:
Jun Nozawa;Katsuo Tsukamoto;Willem van Enckevort;Tomoki Nakamura;Yuki Kimura, Hitoshi Miura;Hisao Satoh,Ken Nagashima;Makoto Konoto;M. Shirai