Laser Deposition of (Sr,Ba)TiO3 Films with Metal–Ethylenediaminetetraacetic Acid Complexes
Laser Deposition of (Sr,Ba)TiO3 Films with Metal–Ethylenediaminetetraacetic Acid Complexes
复制标题
金属-乙二胺四乙酸配合物激光沉积 (Sr,Ba)TiO3 薄膜
DOI：
10.1143/jjap.41.3033
复制
发表时间：
2002
影响因子：
1.5
通讯作者：
H. Saitoh
中科院分区：
文献类型：
--
作者：
A. Nakamura;R. Satoh;S. Ohshio;Nobuyoshi Nambu;H. Saitoh
制备并测试了两种类型的靶材，用于 SrTiO3 和 (Ba,Sr)TiO3 薄膜的激光沉积工艺：机械混合靶材和喷雾干燥靶材。机械混合靶材是由乙二胺四乙酸(EDTA)·Sr·(NH 4 ) 2 和EDTA·Ti·NH 4 的粉末在研钵中制备的混合物获得的。另一方面，喷雾干燥粉末是从由Sr-、Ba-和Ti-EDTA·2NH4组成的溶液中获得的。使用喷雾干燥器干燥溶液。由喷雾干燥靶获得的所有SrTiO 3 膜都具有约1.00的金属组成比[Sr]/[Ti]和光滑的表面。 (Ba,Sr)TiO3 薄膜的晶格常数随着靶材中[Ba]/([Ba]+[Sr])比率的增加而增加。这些结果表明该技术适用于具有复杂化学计量的金属氧化物薄膜的成分设计。
Two types of targets were prepared and examined for the laser deposition process of SrTiO3 and (Ba,Sr)TiO3 films: mechanically mixed target and spray-dried target. The mechanically mixed target was obtained from the mixture prepared in a mortar from powders of ethylenediaminetetraacetic acid (EDTA)·Sr·(NH4)2 and EDTA·Ti·NH4. On the other hand, spray-dried powder was obtained from solution consisting of Sr–, Ba– and Ti–EDTA·2NH4. The solution was dried using a spray dryer. All of the SrTiO3 films obtained from the spray-dried target had a metal composition ratio [Sr]/[Ti] of approximately 1.00 and a smooth surface. The lattice constant of the (Ba,Sr)TiO3 films increased with increasing the [Ba]/([Ba]+[Sr]) ratio in the target. These results imply that this technique is appropriate for composition design of metal oxide films with complicated stoichiometry.