Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopy, Part II: Inelastic scattering
Three-dimensional imaging in double aberration-corrected scanning confocal electron microscopy, Part II: Inelastic scattering
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DOI：
10.1016/j.ultramic.2008.05.007
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发表时间：
2008-11-01
期刊：
影响因子：
2.2
通讯作者：
Allen, L. J.
中科院分区：
文献类型：
--
作者：
D'Alfonso, A. J.;Cosgriff, E. C.;Allen, L. J.
在同一仪器中的球面像差校正前和后标本透镜的实施促进了亚埃电子探针的创建，并使像差校正扫描共聚焦电子显微镜（SCEM）成为可能。进一步的弹性SCEM成像在我们以前的论文中的讨论，我们表明，通过使用非弹性SCEM成像通过晶体样品进行3D光栅扫描，它将有可能确定嵌入在散装基质中的孤立杂质原子的位置。特别是，使用电子能量损失谱的基础上，内壳层电离，以唯一地识别这些原子进行了探索。与扫描透射电子显微镜（STEM）的比较表明，SCEM将提高横向和深度分辨率相对于STEM。特别是，预期的分辨率差的STEM深度切片扩展对象的SCEM几何克服。(C)2008 Elsevier B.V.保留所有权利。
The implementation of spherical aberration-corrected pre- and post-specimen lenses in the same instrument has facilitated the creation of sub-Angstrom electron probes and has made aberration-corrected scanning confocal electron microscopy (SCEM) possible. Further to the discussion of elastic SCEM imaging in our previous paper, we show that by performing a 3D raster scan through a crystalline sample using inelastic SCEM imaging it will be possible to determine the location of isolated impurity atoms embedded within a bulk matrix. In particular, the use of electron energy loss spectroscopy based on inner-shell ionization to uniquely identify these atoms is explored. Comparisons with scanning transmission electron microscopy (STEM) are made showing that SCEM will improve both the lateral and depth resolution relative to STEM. In particular, the expected poor resolution of STEM depth sectioning for extended objects is overcome in the SCEM geometry. (C) 2008 Elsevier B.V. All rights reserved.