1.3um Quantum Dot Distributed Feed Back Laser with Half-Etching Mesa Vertical Grating using Cl2 Dry Etching process

1.3um Quantum Dot Distributed Feed Back Laser with Half-Etching Mesa Vertical Grating using Cl2 Dry Etching process
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1.3um 量子点分布式反馈激光器,采用 Cl2 干法刻蚀工艺,半刻蚀台面垂直光栅

DOI:
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发表时间:
2013
影响因子:
1.5
通讯作者:
KEISHIRO GOSHIMA
KEISHIRO GOSHIMA
中科院分区:
物理与天体物理4区
文献类型:
--
作者:
Taiga Kodama;Toshihisa Osaki;Ryuji Kawano;Koki Kamiya;Norihisa Miki;and Shoji Takeuchi;KEISHIRO GOSHIMA

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