Fabrication of nanometric zinc pattern with photodissociated gas-phase diethylzinc by optical near field

Fabrication of nanometric zinc pattern with photodissociated gas-phase diethylzinc by optical near field
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光近场光解气相二乙基锌制备纳米锌图案

DOI:
10.1063/1.126288
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发表时间:
2000
影响因子:
4
通讯作者:
G. Lee
G. Lee
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Y. Yamamoto;M. Kourogi;M. Ohtsu;V. V. Polonski;G. Lee

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通过近场光解离气相二乙基锌,实现了锌在纳米尺度上的原位图案化。通过使用孔径直径为60 nm的紫外光纤探针,沉积半峰全宽为60和70 nm的点,并以100 nm分开。随着近场能量的增加,量子点的纵横比以0.03/μJ的速率增加。通过在光学近场显微镜系统中扫描探针,还制造了T形图案。
In situ patterning of zinc on a nanometric scale has been accomplished by photodissociation of gas-phase diethylzinc by optical near field. By using an ultraviolet optical fiber probe with an aperture diameter of 60 nm, dots with full width at half maxima of 60 and 70 nm were deposited, and were separated by 100 nm. The aspect ratio of the dots increased at the rate of 0.03/μJ, as the optical near field energy increased. A T-shape pattern was also fabricated by scanning the probe in an optical near field microscope system.
DOI: 10.1063/1.110199
发表时间: 1993-12-06
影响因子: 4
作者:
LEONARD, D;KRISHNAMURTHY, M;PETROFF, PM
通讯作者: PETROFF, PM