High-Resolution Laser-Induced Graphene. Flexible Electronics beyond the Visible Limit
High-Resolution Laser-Induced Graphene. Flexible Electronics beyond the Visible Limit
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DOI：
10.1021/acsami.0c01377
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发表时间：
2020-03-04
影响因子：
9.5
通讯作者：
Tour, James M.
中科院分区：
文献类型：
--
作者：
Stanford, Michael G.;Zhang, Cheng;Tour, James M.
激光诱导石墨烯（LIG）是一种多功能石墨烯泡沫，通常用红外激光直接写入碳基前驱体材料。在这里，一个可见的405 nm激光被用来直接将聚酰亚胺转化为LIG。这使得形成的LIG具有类似于12 μ m的空间分辨率，并且在先前的出版物中报道的LIG特征尺寸厚度减少了60%。这一过程发生在扫描电镜室中，因此可以直接观察到LIG的形成。减小尺寸的LIG特征使直接写入形成的柔性电子设备是不可见的裸眼。演示了一种湿度传感器，该传感器可以检测人体呼吸，响应时间为250毫秒。随着人们对柔性电子和传感器的兴趣日益浓厚，更精细的特性可以大大扩展其实用性。
Laser-induced graphene (LIG) is a multifunctional graphene foam that is commonly direct-written with an infrared laser into a carbon-based precursor material. Here, a visible 405 nm laser is used to directly convert polyimide into LIG. This enabled the formation of LIG with a spatial resolution of similar to 12 mu m and a thickness of 60% reduction in LIG feature sizes reported in prior publications. This process occurs in situ in an SEM chamber, thus allowing direct observation of LIG formation. The reduced size of the LIG features enables the direct-write formation of flexible electronics that are not visible to the unaided eye. A humidity sensor is demonstrated which could detect human breath with a response time of 250 ms. With the growing interest in LIG for flexible electronics and sensors, finer features can greatly expand its utility.