Radiation damage in the TEM and SEM
Radiation damage in the TEM and SEM
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DOI：
10.1016/j.micron.2004.02.003
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发表时间：
2004-01-01
期刊：
影响因子：
2.4
通讯作者：
Malac, M
中科院分区：
文献类型：
--
作者：
Egerton, RF;Li, P;Malac, M
我们回顾了电子束在电子显微镜检查过程中对有机或无机样品产生不利影响的各种方式。考虑的影响有：加热、静电荷电、电离损伤(辐解)、置换损伤、溅射和碳氢化合物污染。在每一种情况下，都确定了将损害降至最低的策略。根据最近的实验证据，我们重新检查了两个常见的假设：辐射损伤量与电子剂量成正比，与束流直径无关；损伤的程度与沉积在样品中的能量成正比。(C)2004爱思唯尔有限公司。保留所有权利。
We review the various ways in which an electron beam can adversely affect an organic or inorganic sample during examination in an electron microscope. The effects considered are: heating, electrostatic charging, ionization damage (radiolysis), displacement damage, sputtering and hydrocarbon contamination. In each case, strategies to minimise the damage are identified. In the light of recent experimental evidence, we re-examine two common assumptions: that the amount of radiation damage is proportional to the electron dose and is independent of beam diameter; and that the extent of the damage is proportional to the amount of energy deposited in the specimen. (C) 2004 Elsevier Ltd. All rights reserved.