An experimental viewpoint on the information depth of EBSD.
An experimental viewpoint on the information depth of EBSD.
复制标题
EBSD信息深度的实验观点
作者：
W. Wisniewski;C. Rüssel
本文对有关电子背散射衍射信息深度的文献进行了评述，并提出了自己的观点。EBSD应用于部分被非晶玻璃楔覆盖的晶体。从被越来越厚的玻璃层覆盖的晶体获得质量下降的EBSD图案。将最后可转位EBSD图案的位置与使用2-20 kV的加速电压从相同晶体获得的SEM显微照片中的最后可辨别对比度进行比较。它的结论是EBSD的信息深度至少是一样大的，从一个非倾斜的样品与4 kV的电压获得的SEM显微照片。讨论了信息深度的概念和实验方法。
This article contains a critical review of the literature concerning the information depth of electron backscatter diffraction (EBSD) and a viewpoint on the topic is formulated. EBSD is applied to a crystal partially covered by a wedge of amorphous glass. EBSD-patterns of decreasing quality are obtained from a crystal covered by an increasingly thick layer of glass. The location of the last indexable EBSD-patterns is compared to the last discernible contrast in SEM-micrographs obtained from the same crystal using accelerating voltages of 2-20 kV. It is concluded that the information depth of EBSD is at least as large as that of an SEM-micrograph obtained with a voltage of 4 kV from a non-tilted sample. Concepts of the information depth and experimental approaches are discussed.