Temperature Sensor Using Quartz Tuning Fork Resonator
Temperature Sensor Using Quartz Tuning Fork Resonator
复制标题
使用石英音叉谐振器的温度传感器
DOI：
10.1109/freq.1986.200946
复制
发表时间：
1986
期刊：
影响因子：
--
通讯作者：
D. Yamazaki
中科院分区：
文献类型：
--
作者：
T. Ueda;F. Kohsaka;T. Iino;D. Yamazaki
总结本文介绍了一种温度传感器的基础上的温度敏感的石英“音叉”谐振器的发展。该谐振器采用光刻和各向异性刻蚀技术制作。考虑到晶体的各向异性蚀刻特性，确定了晶体的最佳切割和晶片上的最佳谐振器取向，以获得与小等效串联电阻一致的大频率温度系数。音叉温度传感器可在很宽的温度范围内工作（从4.2K到250 OC）。在温度传感器在0 °C和4.2K之间循环之后，温度特性中的滞后在0 ° C下仅为0.005K。石英温度传感器非常紧凑--安装在直径仅为3 mm的密封外壳中。
Summary This paper describes the development of a temperature sensor based on a temperature-sensitive quartz "tuning fork" resonator. The resonator was fabricated using photolithography and anisotropic etching. The optimum cut of the crystal and optimum resonator orientation on the wafer were determined - taking into account the anisotropic etching properties of the crystal - to give a large temperature coefficient of frequency consistent with small equivalent series resistance. The tuning fork temperature sensor operates over a wide range of temperature (from 4.2K to 250OC). After the temperature sensor was cycled between O°C and 4.2K, hysteresis in the temperature characteristic was only 0.005K at OOC. The quartz temperature sensor is quite compact -- it is mounted in a hermetic case only 3 mm in diameter.