What is the Young's Modulus of Silicon?
What is the Young's Modulus of Silicon?
复制标题
DOI：
10.1109/jmems.2009.2039697
复制
发表时间：
2010-04-01
影响因子：
2.7
通讯作者：
Kenny, Thomas W.
中科院分区：
文献类型：
--
作者：
Hopcroft, Matthew A.;Nix, William D.;Kenny, Thomas W.
材料的杨氏模量(E)是机械工程设计中的一个重要参数。硅是微电子机械系统(MEMS)中最常用的单一材料，是一种各向异性的晶体材料，其材料性能取决于相对于晶格的取向。这一事实意味着，用于分析硅中两种不同设计的E的正确值可能相差高达45%。然而，也许是因为这个课题的复杂性，许多研究人员过度简化了硅的弹性行为，并在设计和分析时使用了不准确的值。本文提供了最著名的硅弹性数据，包括深度和摘要形式，以便MEMS设计者可以很容易地获得这些数据。[2009-0054]
The Young's modulus (E) of a material is a key parameter for mechanical engineering design. Silicon, the most common single material used in microelectromechanical systems (MEMS), is an anisotropic crystalline material whose material properties depend on orientation relative to the crystal lattice. This fact means that the correct value of E for analyzing two different designs in silicon may differ by up to 45%. However, perhaps, because of the perceived complexity of the subject, many researchers oversimplify silicon elastic behavior and use inaccurate values for design and analysis. This paper presents the best known elasticity data for silicon, both in depth and in a summary form, so that it may be readily accessible to MEMS designers. [2009-0054]