High Sensitivity InSb Ultra-Thin Film Micro-Hall Sensors for Bioscreening Applications
High Sensitivity InSb Ultra-Thin Film Micro-Hall Sensors for Bioscreening Applications
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DOI：
10.1143/jjap.43.l868
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发表时间：
2004-06
影响因子：
1.5
通讯作者：
A. Sandhu;H. Sanbonsugi;I. Shibasaki;M. Abe;H. Handa
中科院分区：
文献类型：
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作者：
A. Sandhu;H. Sanbonsugi;I. Shibasaki;M. Abe;H. Handa
研制了一种用于生物筛选的高灵敏度、4.5µm×4.5µm的InSb薄膜微霍尔传感器(MICRO-HS)，其最小场强检测(Bmin)为77 nT/(Hz)1/2，用于监测直径2.8µm的超顺磁性微球的交流磁化率。通过制作Bmin为0.72µT/(Hz)1/2的500 nm×500 nm InSb纳米霍尔传感器，证明了InSb微霍尔传感器的可扩展性，该传感器可用于检测100 nm尺寸的超顺磁性粒子。
A high sensitivity, 4.5 µm×4.5 µm InSb thin film micro-Hall sensor (micro-HS) with a minimum field detection (Bmin) of 77 nT/(Hz)1/2 was developed for bioscreening applications and used for the detection of a single 2.8 µm diameter superparamagnetic microbead by monitoring its ac magnetic susceptibility. The scalability of the InSb micro-HS was demonstrated by fabricating 500 nm×500 nm InSb nano-Hall sensors with Bmin of 0.72 µT/(Hz)1/2 that could potentially be used to detect 100 nm sized superparamagnetic particles.