Development of a Compact Electron Beam Ion Source Cooled with Liquid Nitrogen
Development of a Compact Electron Beam Ion Source Cooled with Liquid Nitrogen
复制标题
液氮冷却紧凑型电子束离子源的开发
DOI：
10.1143/jjap.28.1124
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发表时间：
1989
影响因子：
1.5
通讯作者：
K. Okuno
中科院分区：
文献类型：
--
作者：
K. Okuno
开发出用于产生高电荷离子的小型 EBIS 型离子源（mini-EBIS）。整个系统，即电子枪、离子漂移管、电子收集器、离子提取透镜和含有螺线管线圈的液氮储存器，安装在直径150mmφ、长度500mm的真空外壳内。事实证明，将螺线管冷却至 77 K 的想法对于螺线管及其电源的小型化非常有效。此外，液氮储存器的壁在电离区域表现出低温泵送功能。在2 keV、15 mA电子电流的直流离子提取模式下，C6+、N7+、O8+、Ne9+和Ar16+离子获得的束流强度分别至少为每秒5×104、3×104、1×104、5×103和3×103计数。
A small-sized EBIS type ion source (mini-EBIS) for production of highly charged ions has been developed. The whole system, namely, the electron gun, ion drift tube, electron collector, ion extraction lens and liquid nitrogen reservoir containing solenoid coil is housed in a vacuum envelope, 150 mmφ in diameter and 500 mm in length. The idea of cooling the solenoid to 77 K has proved very effective to miniaturize the solenoid and its power supply. Moreover, the wall of the liquid nitrogen reservoir exhibits a cryogenic pumping function at the ionization region. In the DC ion extraction mode with an electron current of 15 mA at 2 keV, beam intensities obtained for C6+, N7+, O8+, Ne9+ and Ar16+ ions are at least 5×104, 3×104, 1×104, 5×103 and 3×103 counts per second, respectively.