Large-area high-reflectivity broadband monolithic silicon photonic crystal mirror MEMS scanner
Large-area high-reflectivity broadband monolithic silicon photonic crystal mirror MEMS scanner
复制标题
大面积高反射率宽带单片硅光子晶体镜MEMS扫描仪
DOI：
10.1109/omems.2008.4607836
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发表时间：
2008
期刊：
影响因子：
--
通讯作者：
O. Solgaard
中科院分区：
文献类型：
--
作者：
I. Jung;S.B. Mallick;O. Solgaard
本文介绍了一种MEMS扫描器，该扫描器采用单片硅二维光子晶体（PC）反射镜，在1550 nm波段具有宽带高反射率（>90%）。光子晶体作为MEMS扫描器制造过程的集成部分而产生，从而产生具有超平坦的镜的单片结构，该镜在500 μ m乘500 μ m的面积上具有~ λ/100的平坦度。反射光谱表明，PC反射镜在1520 nm ~ 1620 nm范围内具有高反射率（>90%）。扫描仪在67 V的输入方波和2.13 kHz的谐振频率下具有22度的扫描范围。
In this paper we introduce a MEMS scanner with a monolithic silicon 2-D photonic crystal (PC) mirror with broad-band high reflectivity (>90%) in the 1550 nm wavelength band. The photonic crystal is generated as an integrated part of the MEMS scanner fabrication process, resulting in a monolithic structure with a mirror that is ultra-flat with ~lambda/100 flatness over a 500 mum times 500 mum area. The reflectance spectrum shows that the PC mirror has a high reflectivity (>90%) band from 1520 nm-1620 nm. The scanner has a scan range of 22 degrees at an input square wave of 67 V with a resonance frequency of 2.13 kHz.