Tribological and oxidation behaviour of TiAlCN/VCN nanoscale multilayer coating deposited by the combined HIPIMS/(HIPIMS-UBM) technique
Tribological and oxidation behaviour of TiAlCN/VCN nanoscale multilayer coating deposited by the combined HIPIMS/(HIPIMS-UBM) technique
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DOI：
10.1016/j.surfcoat.2010.10.049
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发表时间：
2011-01-25
影响因子：
5.4
通讯作者：
Hovsepian, P. Eh
中科院分区：
文献类型：
--
作者：
Kamath, G.;Ehiasarian, A. P.;Hovsepian, P. Eh
采用高功率脉冲磁控溅射与非平衡磁控溅射（HIPIMS-UBM）相结合的方法制备了TiAlCN/VCN纳米多层膜，双层膜厚度为2.2nm，总厚度为2.6 μ m。HIPIMS用于表面预处理以及涂层沉积步骤。HIPIMS等离子体的离子组成作为放电电流的函数，通过使用能量分辨质谱仪的等离子体采样进行分析。光谱强度显示等离子体中Ti+、V+和Al+的高金属离子浓度。由于反应性甲烷（CH 4）气体的分解，还观察到显著量的C+离子。冷凝物质的高度电离导致形成高度致密的微观结构。这通过横截面TEM分析得到证实。热重分析表明，快速氧化开始温度显著升高至约780 ℃。相比之下，无碳的TiAlN/VN多层涂层在638摄氏度开始迅速氧化。在室温和200 ℃、450 ℃和650 ℃的高温下对涂层进行干滑动磨损试验。发现摩擦系数在室温下为mu = 0.45，而该系数分别从200 ℃下的0.7稳定地降低到450 ℃下的0.5和650 ℃下的0.4。在涂层的磨损痕迹中获取的拉曼光谱表明存在V2 O 5、VO 2、TiO 2和AlVO 4形式的Magneli相氧化物。这些拉曼结果与先前报道的在上述连续温度下在TiAlCN/VCN涂层的氧化表面上进行的XRD研究进行了比较。(C)2010爱思唯尔有限公司版权所有。
A TiAlCN/VCN nanostructured multilayer coating with a bi-layer thickness of 2.2 nm and a total thickness of 2.6 mu m was deposited by mixed High Power Impulse Magnetron Sputtering and Unbalanced Magnetron Sputtering (HIPIMS-UBM) technique. HIPIMS was utilized in both surface pretreatment as well as coating deposition steps. The ionic composition of the HIPIMS plasma as a function of discharge current was analysed by plasma sampling using energy-resolved mass spectrometery. The spectral intensities have shown high metal ion concentration of Ti+, V+, and Al+ in the plasma. A significant amount of C+ ions were also observed due to the decomposition of the reactive methane (CH4) gas. High ionisation of the condensing species resulted in formation of a highly dense microstructure. This was confirmed through the cross-sectional TEM analysis. Thermo-gravimetric analysis showed a significant rise in the onset of rapid oxidation temperature to approximate to 780 degrees C. In contrast, the carbon-free TiAlN/VN multilayer coating starts oxidising rapidly at 638 degrees C. Dry sliding wear tests were conducted on the coatings at room temperature and at elevated temperatures of 200 degrees C, 450 degrees C, and 650 degrees C. The friction coefficient was found to be mu = 0.45 at room temperature, whereas the coefficient steadily decreased from 0.7 at 200 degrees C, to 0.5 at 450 degrees C and 0.4 at 650 degrees C respectively. Raman spectra taken in the wear track of the coating suggested the presence of Magneli phase oxides of the form, V2O5, VO2, TiO2, and AlVO4, These Raman results were compared with previously reported XRD studies performed on the oxidised surface of the TiAlCN/VCN coating at above mentioned consecutive temperatures. (C) 2010 Elsevier B.V. All rights reserved.