New strategy of nanolithography via controlled block copolymer self-assembly
New strategy of nanolithography via controlled block copolymer self-assembly
复制标题
通过受控嵌段共聚物自组装的纳米光刻新策略
DOI：
10.1039/c2sm26833g
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发表时间：
2013-01-01
期刊：
影响因子：
3.4
通讯作者：
Shi, An-Chang
中科院分区：
文献类型：
--
作者：
Xie, Nan;Li, Weihua;Shi, An-Chang
嵌段共聚物-均聚物共混物的自组装以及在周期性图案表面方向下的自组装，已经通过时间相关的金兹堡-朗道理论的计算机模拟进行了研究。具体来说，添加少量均聚物来调节自发成核速率，并设计基底图案来控制诱导核的位置和方向。使用圆柱体形成嵌段共聚物-均聚物共混物的 2D 和 3D 计算机模拟检验了该方案的机制、有效性和效率，证明可以通过控制诱导的多个成核事件的位置和方向来产生大规模完美有序的图案。该方案将嵌段共聚物自组装的成核事件与图案化表面的方向相结合，可用于嵌段共聚物的光刻技术，显着提高定向效率，即密度倍增。
The self-assembly of block copolymer-homopolymer blends in bulk, as well as under the direction of periodic patterned surfaces, has been investigated by computer simulations of the time-dependent Ginzburg-Landau theory. Specifically, a small amount of homopolymers are added to regulate the spontaneous nucleation rate and substrate patterns are designed to control the position and orientation of the induced nuclei. The mechanism, validity and efficiency of this scheme is examined using 2D and 3D computer simulations of cylinder-forming block copolymer-homopolymer blends, demonstrating that large-scale perfectly ordered patterns can be produced by controlling the position and orientation of induced multiple nucleation events. This scheme, combining the nucleation event of block copolymer self-assembly with the direction of the patterned surface, can be used in the lithography technique of block copolymers to significantly improve the directing efficiency, i.e., the density multiplication.