Process for High Speed Micro Electro Mechanical Systems (MEMS) Scanning Mirrors with Vertical Comb Drives
Process for High Speed Micro Electro Mechanical Systems (MEMS) Scanning Mirrors with Vertical Comb Drives
复制标题
具有垂直梳状驱动器的高速微机电系统 (MEMS) 扫描镜工艺
DOI：
10.1143/jjap.41.l899
复制
发表时间：
2002
影响因子：
1.5
通讯作者：
O. Solgaard
中科院分区：
文献类型：
--
作者：
H. Wada;Daesung Lee;U. Krishnamoorthy;S. Zappe;O. Solgaard
提出了一种垂直梳状驱动快速扫描微镜的三级制作工艺。该工艺仅使用正面光刻来创建具有自对准梳齿的梳状驱动器。可移动梳齿和固定梳齿的自对准允许使用快速扫描所必需的高电压。制造过程是基于两个晶圆键合步骤，以创建一个三级结构，非常适合阵列应用。
We present a three-level fabrication process for fast scanning micromirrors actuated by vertical comb drives. The process uses only front side lithography to create combdrives with selfaligned comb teeth. Selfalignment of the movable and stationary comb teeth allows the use of high voltages that are necessary for fast scanning. The fabrication process is based on two wafer-bonding steps to create a three-level structure that is well suited for array applications.