Giant magnetostrictive materials: thin film formation and application to magnetic surface acoustic wave devices
Giant magnetostrictive materials: thin film formation and application to magnetic surface acoustic wave devices
复制标题
超磁致伸缩材料：薄膜形成及其在磁性表面声波器件中的应用
DOI：
10.1016/0925-8388(94)90570-3
复制
发表时间：
1994
影响因子：
6.2
通讯作者：
T. Kurino
中科院分区：
文献类型：
--
作者：
H. Uchida;M. Wada;K. Koike;H. Uchida;V. Koeninger;Y. Matsumura;H. Kaneko;T. Kurino
本文指出了目前超磁致伸缩材料（GMM）研究和开发中存在的问题，并强调使用薄膜GMM代替块体材料，因为其制备方便、成本低廉、适用性强。 GMM 薄膜最突出的应用之一是在外部磁场下具有可调谐性的磁性表面声波器件。采用真空闪蒸法制备了超磁致伸缩Tb0.3Dy0.7Fe2合金薄膜。通过控制基底温度和沉积速率，薄膜结构能够从非晶态转变为晶态。晶体薄膜比非晶薄膜表现出更高的磁化强度和更大的磁致伸缩。真空中薄膜的污染促进了非晶化并显着降低了薄膜的磁致伸缩。 X射线衍射和俄歇电子能谱分析表明，真空与沉积速率的比率是评估薄膜污染效应的合适指标。
This paper points out current problems in the research and development of giant magnetostrictive materials (GMMs), and the use of thin film GMMs instead of bulk is emphasized because of the ready and inexpensive production and high applicability. One of the most prominent applications using GMM films is the magnetic surface acoustic wave device with tunability under an external magnetic field. Thin films of the giant magnetostrictive Tb0.3Dy0.7Fe2alloy were prepared by vacuum flash evaporation. The film structure was able to be changed from amorphous to crystalline by controlling the substrate temperature and deposition rate. The crystalline films exhibited much higher magnetization and larger magnetostrictions than did the amorphous films. The contamination of the films in vacuum facilitated amorphization and markedly reduced the magnetostrictions of the films. X-ray diffraction and Auger electron spectroscopy analyses revealed that the ratio of vacuum to deposition rate is an appropriate indicator to assess the contamination effect of films.