Efficient ultraprecision machining system by means of industrial robot
Efficient ultraprecision machining system by means of industrial robot
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通讯作者：
Meng Xu;K. Nakamoto;Y. Takeuchi
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作者：
Meng Xu;K. Nakamoto;Y. Takeuchi
光学元件，如光刻中使用的透镜，需要纳米精度[1]。为了满足这一要求，对高精度的加工技术提出了极高的要求。作者已经开发了一些加工方法来制造微型零件的金刚石刀具[2]。为了获得高精度的光学零件，整个加工过程通常在同一台超精密机床上进行。然而，超精密机床相对较慢的进给速度和较小的加工深度不允许提高加工效率。特别是近年来的光学零件变得复杂，加工区域变宽，加工时间的增加导致成本上升。单用一台超精密机床很难提高加工效率。因此，本研究的目的是开发一种高效的超精密加工系统，通过工业机器人和普通加工中心，以获得工件具有接近目标形状的形状迅速。然而，当工业机器人用于使手动设置操作自动化时，安装在超精密机床上的预先准备的工件的设置误差是不可避免的。为了解决这一问题，在本研究中，采用了一种机上测量装置来识别工件在超精密机床上的实际位置和姿态，并修改原始NC数据以补偿估计的工件设置误差，以创建高精度零件。
Optical elements such as lenses used in photolithography need nanometric accuracy [1]. To satisfy the demand, the machining technology with high precision is extremely required. The authors have developed some machining methods to fabricate the microparts by means of diamond cutting tools [2]. To obtain highly precise optical parts, the whole machining procedure is usually conducted on the same ultraprecision machine tool. However, the relatively slow feed rate and small machining depth of ultraprecision machine tool are not allowed to improve the machining efficiency. Especially, the recent optical parts are changed to be complex and the machining area becomes wide, the increasing machining time leads to the rising cost. It is difficult to improve the machining efficiency just by using one ultraprecision machine tool. Thus, this study aims at developing an efficient ultraprecision machining system by means of an industrial robot and an ordinary machining center to obtain the workpiece having a shape near the target shape quickly. However, the setting errors of the beforehand prepared workpiece mounted on the ultraprecision machine tool are inevitable when an industrial robot is used to automate a manual setting operation. To solve the problem, in this study, an on ‐ machine measurement device is adapted to identify the actual position and attitude of workpiece on the ultraprecision machine tool and original NC data is modified to compensate the workpiece setting errors estimated to create highly precise parts.