Laser-rf creation and diagnostics of seeded atmospheric pressure air and nitrogen plasmas
Laser-rf creation and diagnostics of seeded atmospheric pressure air and nitrogen plasmas
复制标题
DOI：
10.1063/1.2946718
复制
发表时间：
2008-07
影响因子：
3.2
通讯作者：
Siqi Luo;C. Denning;J. Scharer
中科院分区：
文献类型：
--
作者：
Siqi Luo;C. Denning;J. Scharer
在我们以前工作的基础上，发展和改进了激光引发和射频维持技术，以产生和维持大体积、高压空气和氮气等离子体。该技术利用激光引发的15毫托分压的四（二甲氨基）乙烯种子等离子体与75托的背景气体压力，以实现高压空气/氮等离子体击穿，并降低所需的射频功率维持等离子体的要求。在激光等离子体引发时，通过脉冲气体阀在0.5秒内将室压力升高至760托，随后将室的端部向环境空气打开。然后用13.56 MHz射频功率维持大气压等离子体。使用这种技术，已经产生了大体积（1000 cm 3）、高电子密度（在1011-12 cm-3的数量级上）、760 Torr空气和氮等离子体，同时使用动态匹配方法在整个等离子体脉冲期间使RF功率反射最小化。这种等离子体可以投射出...
A laser initiation and radio frequency (rf) sustainment technique has been developed and improved from our previous work to create and sustain large-volume, high-pressure air and nitrogen plasmas. This technique utilizes a laser-initiated, 15 mTorr partial pressure tetrakis (dimethylamino) ethylene seed plasma with a 75 Torr background gas pressure to achieve high-pressure air/nitrogen plasma breakdown and reduce the rf power requirement needed to sustain the plasma. Upon the laser plasma initiation, the chamber pressure is raised to 760 Torr in 0.5 s through a pulsed gas valve, and the end of the chamber is subsequently opened to the ambient air. The atmospheric-pressure plasma is then maintained with the 13.56 MHz rf power. Using this technique, large-volume (1000 cm3), high electron density (on the order of 1011–12 cm−3), 760 Torr air and nitrogen plasmas have been created while rf power reflection is minimized during the entire plasma pulse utilizing a dynamic matching method. This plasma can project ...