Layered SAW gas sensor with single-walled carbon nanotube-based nanocomposite coating
Layered SAW gas sensor with single-walled carbon nanotube-based nanocomposite coating
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DOI：
10.1016/j.snb.2007.07.028
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发表时间：
2007-10-20
影响因子：
8.4
通讯作者：
Kalantar-Zadeh, K.
中科院分区：
文献类型：
--
作者：
Penza, M.;Aversa, P.;Kalantar-Zadeh, K.
设计并制造了一种在 36 度 Y 切 X 传播 LiTaO3 压电基板上使用 ZnO 引导层的表面声波 (SAW) 传感器。使用 Langmuir-Blodgett 技术沉积了基于单壁碳纳米管 (SWCNT) 的纳米复合涂层。该传感器针对 H-2、NH3、NO 等气体进行了测试，范围分别为 0.030-1%、30-1000 ppm、1-10ppm。输出信号是 SAW 器件的相位，使用网络分析仪对其进行监控。所开发的传感器在室温下具有高灵敏度、良好的重复性和亚 ppm 级的低检测限。将获得的实验结果与理论模型进行比较，并通过在 SAW 响应中占主导地位的声电效应讨论 SAW 气体传感机制。 (c) 2007 Elsevier B.V. 保留所有权利。
A Surface acoustic wave (SAW) sensor using a ZnO guiding layer on 36 degrees Y-cut X-propagation LiTaO3 piezoelectric substrate has been designed and fabricated. Single-walled carbon nanotube (SWCNT)-based nanocomposite coatings have been deposited using the Langmuir-Blodgett technique. The sensor was tested towards H-2, NH3, NO, gases, in the range of 0.030-1%, 30-1000 ppm, 1-10ppm, respectively. The output signal was the phase of the SAW device, which was monitored using a network analyzer. The developed sensor has a high sensitivity, good repeatability and low detection limit at sub-ppm levels, at room temperature. The experimental results obtained are compared to a theoretical model and the SAW gas sensing mechanisms are discussed with the acoustoelectric effect that appears to be dominant in the SAW response. (c) 2007 Elsevier B.V. All rights reserved.