Electrically induced change in HfO2/1-monolayer TiO2/SiO2 metal-oxide-semiconductor stacks: capacitance-voltage and hard X-ray photoelectron spectroscopy studies

Electrically induced change in HfO2/1-monolayer TiO2/SiO2 metal-oxide-semiconductor stacks: capacitance-voltage and hard X-ray photoelectron spectroscopy studies
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HfO2/1-单层 TiO2/SiO2 金属氧化物半导体堆栈中的电致变化:电容电压和硬 X 射线光电子能谱研究

DOI:
10.35848/1882-0786/ac0b08
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发表时间:
2021
影响因子:
2.3
通讯作者:
and Hiroshi Nohira
and Hiroshi Nohira
中科院分区:
物理与天体物理3区
文献类型:
--
作者:
Noriyuki Miyata;Kyoko Sumita;Akira Yasui;Ryousuke Sano;Reito Wada;and Hiroshi Nohira

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