Development of superlattice during thermal annealing in Pt/AlN multilayer films
Development of superlattice during thermal annealing in Pt/AlN multilayer films
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Pt/AlN 多层薄膜热退火过程中超晶格的形成
DOI：
10.1088/1742-6596/83/1/012020
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发表时间：
2007
期刊：
影响因子：
--
通讯作者：
Yoshio Nakamura
中科院分区：
文献类型：
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作者：
T. Harumoto;Ji Shi;Yoshio Nakamura
Pt/AlN 多层膜的结构通过 X 射线反射率 (XRR) 和 X 射线衍射 (XRD) 的组合进行表征。沉积薄膜具有精确的周期性和突变的界面，从而可以实现高达 2q = 15° 的镜面反射。在低于 600°C 的温度下退火的样品的第一布拉格反射的反射率几乎恒定在 65% 左右。通过退火，强度调制重叠在 111Pt 反射上，表明多层膜中形成了一种超晶格。退火被认为引起溅射气体的释放、Pt层的恢复和小幅取向调整。另一方面，AlN 层在这些温度下的退火过程中没有表现出变化。结果，尽管具有择优取向的相邻Pt层被AlN隔开，但它们在衍射强度上表现出相关性。
The structures of Pt/AlN multilayer films were characterised by a combination of X-ray reflectivity (XRR) and X-ray diffraction (XRD). As-deposited film has accurate periodicity and abrupt interfaces, which make possible specular reflections up to 2q = 15°. The reflectivities of 1st Bragg reflection of the specimens annealed at temperatures below 600°C are almost constant about 65%. By annealing, intensity modulations overlap on the 111Pt reflection, indicating the formation of a kind of superlattice in the multilayer films. Annealing is considered to cause the release of sputtering gases, recovery and small orientation adjustment of Pt layers. On the other hand, AlN layers do not show changes during annealing at these temperatures. As a result, adjacent Pt layers with preferred orientation come to show a correlation in diffraction intensity although they are separated by AlN.