Preparation of SrTiO3 Films on sapphire substrate by RF magnetron sputtering
Preparation of SrTiO3 Films on sapphire substrate by RF magnetron sputtering
复制标题
射频磁控溅射在蓝宝石衬底上制备SrTiO3薄膜
DOI:
10.1016/s0042-207x(98)00146-8
复制
发表时间:
1998
期刊:
影响因子:
4
通讯作者:
A. Prudan
中科院分区:
文献类型:
--
作者:
V. Loginov;E. Hollmann;A. Kozyrev;A. Prudan