Towards sub-Ã… electron beams
Towards sub-Ã… electron beams
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DOI：
10.1016/s0304-3991(99)00013-3
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发表时间：
1999-06-01
期刊：
影响因子：
2.2
通讯作者：
Lupini, AR
中科院分区：
文献类型：
--
作者：
Krivanek, OL;Dellby, N;Lupini, AR
评估了通过扫描透射电子显微镜（STEM）中的像差校正达到亚埃电子探针的前景。介绍并讨论了从 100 keV STEM C-s 校正器 ape 工作中获得的设计、结果和实践经验。概述了特别关注不稳定性影响的第二代四极-八极 C-s 校正器的设计。为新校正器计算的探针形状表明它将能够在 100 keV 下产生小于 1 埃的探针。 (C) 1999 Elsevier Science B.V. 保留所有权利。
The prospects for reaching sub-Angstrom electron probes through aberration correction in the scanning transmission electron microscope (STEM) are evaluated. The design, results and practical experience gained from a working 100 keV STEM C-s corrector ape presented and discussed. The design of a second-generation quadrupole-octupole C-s corrector that pays particular attention to the influence of instabilities is outlined. Probe shapes calculated for the new corrector indicate that it will be able to produce a probe smaller than 1 Angstrom at 100 keV. (C) 1999 Elsevier Science B.V. All rights reserved.