Novel dual Marx generator for microplasma applications
Novel dual Marx generator for microplasma applications
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DOI：
10.1109/tps.2005.852433
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发表时间：
2005-08-01
影响因子：
1.5
通讯作者：
Akiyama, H
中科院分区：
文献类型：
--
作者：
Heeren, T;Ueno, T;Akiyama, H
微米尺寸的等离子体。或微等离子体，在污染控制、减少和预防方面得到应用。所需的非热等离子体可以通过电子束或放电产生。产生这些非热等离子体所需的脉冲宽度和电压分别为 10(-10)-10(-8) 和 10(3)-10(4) V，具体取决于应用。所需能量通常在 10(-3) J 范围内。本文提出了一种新颖的电路设计，可在低 10(-9) s 范围内生成具有可变脉冲宽度和脉冲上升和下降时间的高压脉冲。该电路采用两个并联的 Marx 发生器，利用双极结型晶体管 (BJT) 作为闭合开关。 BJT 在雪崩模式下工作以产生快速上升。次。该设计允许正极性或负极性脉冲，并且可以轻松更改以产生更高或更低的输出电压。
Micrometer size plasmas. or microplasmas, find applications in pollution control reduction, and prevention. The required nonthermal plasmas can be, generated by either an electron beam or an electric discharge. The pulse widths and voltages necessary to generate these nonthermal plasmas are 10(-10)-10(-8)'s, and 10(3)-10(4) V, respectively, depending on the application. The required energy is typically in the low 10(-3) J range. This paper presents a novel circuit design to generate high-voltage pulses With variable pulse widths and pulse rise and fall times in the low 10(-9) s regime. The circuit employs two parallel Marx Generators utilizing bipolar junction transistors (BJTs) as closing switches. The BJTs are operated in the avalanche mode to yield fast rise. times. The design allows for positive or negative polarity pulses, and can easily be changed to yield higher or lower output voltage.