A stator for a self-running, ultrasonically-levitated sliding stage
A stator for a self-running, ultrasonically-levitated sliding stage
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DOI：
10.1109/tuffc.2007.538
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发表时间：
2007-12
期刊：
影响因子：
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通讯作者：
D. Koyama;K. Nakamura;S. Ueha
中科院分区：
文献类型：
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作者：
D. Koyama;K. Nakamura;S. Ueha
在这里，我们提出了一种自运行的超声波悬浮滑动台，并研究了其定子的悬浮和推进特性。定子由两根铝梁和四块 PZT 板组成，具有两对双压电晶片配置。通过向 PZT 施加输入电压，沿梁产生弯曲驻波，并且定子可以通过其自身振动梁产生的声辐射力从平坦基板上悬浮。使用有限元分析（FEA）优化定子的尺寸，以最大化梁的振动位移幅度。 24.3 kHz 和 102 kHz 的弯曲振动模式是最突出的振动模式，具有大的位移幅度。定子悬浮频率为 23.2 kHz 和 96.1 kHz，接近 FEA 结果预测的频率。沿着光束观察到驻波。实验和模拟结果显示出良好的一致性。通过改变梁u的振动位移幅度来测量悬浮距离h，并发现悬浮距离h与u成正比。当通过控制两个换能器的时间相位差沿梁激发行波时，可以使定子悬停并沿与行波相反的方向移动。当相位差在0°至200°和310°至360°范围内时，定子沿正方向移动，而当相位差在220°至260°之间时，定子沿负方向移动。
Here we propose a self-running, ultrasonically-levitated sliding stage and investigate the levitation and propulsion characteristics of its stator. The stator consists of two aluminum beams and four PZT plates, which have two-paired bimorph configurations. A flexural standing wave was generated along the beam by applying an input voltage to the PZTs, and the stator could be levitated from a flat substrate by the acoustic radiation force generated by its own vibrating beam. The size of the stator was optimized using finite-element analysis (FEA) to maximize the vibration displacement amplitude of the beam. The flexuial vibration modes at 24.3 and 102 kHz were the most prominent vibration modes having large displacement amplitudes. The stator was levitated at 23.2 and 96.1 kHz, which are close to the frequencies predicted by the FEA results. A standing wave was observed along the beam. The experimental and the simulated results showed good agreement. The levitation distance h was measured by varying the vibration displacement amplitude of the beam u, and was found to be proportional to u. When a traveling wave was excited along the beam by controlling the temporal phase difference of the two transducers, the stator could be made to hover and to move in the opposite direction to the traveling wave. The stator moved in the positive direction when the phase difference was in the ranges 0° to 200° and 310° to 360°, and in the negative direction when the phase difference was between 220° and 260°.