Controlling the optical properties of Hafnium Dioxide thin films deposited with Electron Cyclotron Resonance Ion Beam Deposition
Controlling the optical properties of Hafnium Dioxide thin films deposited with Electron Cyclotron Resonance Ion Beam Deposition
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DOI：
10.1016/j.tsf.2023.139781
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发表时间：
2023-03
期刊：
影响因子：
2.1
通讯作者：
Chalisa Gier;M. B. Yaala;Callum Wiseman;S. Macfoy;M. Chicoine;F. Schiettekatte;J. Hough;S. Rowan;I. Martin;P. MacKay;S. Reid
中科院分区：
文献类型：
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作者：
Chalisa Gier;M. B. Yaala;Callum Wiseman;S. Macfoy;M. Chicoine;F. Schiettekatte;J. Hough;S. Rowan;I. Martin;P. MacKay;S. Reid
