A gas-liquid-solid three-phase abrasive flow processing method based on bubble collapsing
A gas-liquid-solid three-phase abrasive flow processing method based on bubble collapsing
复制标题
基于气泡破裂的气液固三相磨粒流加工方法
DOI：
10.1007/s00170-017-1250-9
复制
发表时间：
2018-03-01
影响因子：
3.4
通讯作者：
Tan, Da-peng
中科院分区：
文献类型：
--
作者：
Ge, Jiang-qin;Ji, Shi-ming;Tan, Da-peng
软磨料流（SAF）加工在避免表面损伤和适应复杂工件形状方面具有优势。然而，目前的SAF方法对材料的加工效率较低。针对这一问题，提出了一种基于气泡崩塌的气-液-固三相磨粒流处理方法。通过表面约束模块，构建了硅片加工的多入口约束流道，将气泡注入磨粒流中，增强加工效率。以欧拉多相模型和种群平衡模型（PBM）为基础，建立了GLSP流体力学模型。仿真结果表明，通过设计通道结构可以控制气泡破裂区域，通过降低流体粘度可以加强近壁颗粒的湍流运动。观察和处理实验表明，气泡破裂最剧烈的区域发生在初始约束表面区域。气泡崩塌可使平均粒子速度从12.90 m/s增加到15.97 m/s。与SAF方法相比，该方法的加工效率提高了50%，平均表面粗糙度达到2.84 nm。
Soft abrasive flow (SAF) processing presents advantages in avoiding surface damages and adapting complex workpiece shapes. However, the current SAF method exhibits low processing efficiency for materials. To solve this problem, a gas-liquid-solid three-phase abrasive flow processing method (GLSP) based on bubble collapsing is proposed. Through a surface constrained module, a multi-inlet constrained flow passage for silicon wafer processing is constructed, in which the bubbles are injected into the abrasive flow to strengthen the processing efficiency. On the basis of the Euler multi-phase model and population balance model (PBM), a GLSP fluid mechanic model is set up. Simulation results show that the bubble collapse region can be controlled by designing the flow passage structure and that the near-wall particle turbulent motion can be strengthened by decreasing the fluid viscosity. The observation and processing experiments show that the most violent bubble collapsing occurs in the initial constrained surface region. Bubble collapsing can result in an average particle velocity increase from 12.90 to 15.97 m/s. The proposed GLSP method can increase the processing efficiency by 50% compared with the SAF method, and the average surface roughness can reach 2.84 nm.