Orientation, pattern center refinement and deformation state extraction through global optimization algorithms
Orientation, pattern center refinement and deformation state extraction through global optimization algorithms
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通过全局优化算法进行定向、图案中心细化和变形状态提取
DOI:
10.1016/j.ultramic.2021.113407
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发表时间:
2022
期刊:
影响因子:
2.2
通讯作者:
De Graef, Marc
中科院分区:
文献类型:
--
作者:
Zhu, Chaoyi;Kurniawan, Christian;Ochsendorf, Marcus;An, Dayong;Zaefferer, Stefan;De Graef, Marc