Materials for lithium thin-film batteries for application in silicon technology
Materials for lithium thin-film batteries for application in silicon technology
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DOI：
10.1016/s0167-2738(96)00489-4
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发表时间：
1996-12-01
影响因子：
3.2
通讯作者：
Weppner, W
中科院分区：
文献类型：
--
作者：
Birke, P;Chu, WF;Weppner, W
研究了射频溅射制备的可充电锂电池沉积薄膜材料。分别使用LI(3)PO(4)、LiBO2和Li2ZrO3靶材溅射薄膜电解质和薄缓冲层。由C和Li4Fe0.5Ti4.5O11.75靶材制备负极薄膜。在Ar+O-2气氛中反应溅射W和Mo金属以获得WO2和MoO2薄膜。 LiCoO2 和 LiMn2O4 靶材用于制造薄正极层。描述了各种观察结果。对于通过在 N-2 中反应溅射 Li3PO4 制成的 LiPON，已经获得了有关其化学稳定性的新结果。通过阻抗分析研究电解质膜。为了表征电极层，通过 GITT 测定化学扩散系数。展示了通过溅射 Mo（顶部集流体）、Li4Fe0.5Ti4.5O11.75（负极）、LIBO(2)（电解质）、LiCoO2（正极）和 Pt/Rh-90/10 wt.%（底部集流体）靶材制备的薄型电池的充放电曲线。
As-deposited thin-film materials for rechargeable lithium batteries prepared by r.f.-sputtering have been studied. Thin-film electrolytes and thin buffer layers were sputtered by using LI(3)PO(4) and LiBO2 and Li2ZrO3 targets, respectively. Thin negative electrode films were prepared from C and Li4Fe0.5Ti4.5O11.75 targets. Reactive sputtering of W and Mo metal in Ar+O-2 atmospheres was applied to obtain WO2 and MoO2 thin films. LiCoO2 and LiMn2O4 targets were employed for the fabrication of thin positive electrode layers. Various observations are described. In the case of LiPON, which is made by sputtering Li3PO4 reactively in N-2, new results concerning its chemical stability have been obtained. The electrolyte films were investigated by impedance analysis. To characterize the electrode layers, the chemical diffusion coefficient was determined by GITT. Charge-discharge curves of a thin-him battery prepared by sputtering from Mo (top current collector), Li4Fe0.5Ti4.5O11.75, (negative electrode), LIBO(2) (electrolyte), LiCoO2 (positive electrode) and Pt/Rh-90/10 wt.% (bottom current collector) targets are presented.