High-resolution micro-grating accelerometer based on a gram-scale proof mass
High-resolution micro-grating accelerometer based on a gram-scale proof mass
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DOI：
10.1364/oe.27.034298
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发表时间：
2019-11-11
期刊：
影响因子：
3.8
通讯作者：
Feng, Lishuang
中科院分区：
文献类型：
--
作者：
Gao, Shan;Zhou, Zhen;Feng, Lishuang
利用光学系统检测微小位移的微光栅加速度计可广泛应用于惯性导航和地震监测等领域。为了降低热机械噪声这一高分辨率加速度计的基本限制，提出了一种具有克级质量块的微光栅加速度计样机。基于高斯光束理论，建立了微光栅加速度计对比度的理论模型，采用基于扫描狭缝光束轮廓仪的调整方法，有效地提高了0阶对比度。实验结果表明，与原样机相比，本底噪声从0.9mg/rootHz降低到137 mg/rootHz，零偏稳定度从0.35mg降低到3.1 μ g。(C)根据OSA开放获取出版协议的条款，2019年美国光学学会
Micro-grating accelerometer detecting small displacement by an optical system can be widely applied in inertial navigation and seismic monitoring. We proposed a micro-grating accelerometer prototype with a proof mass of gram-scale to decrease the thermal mechanical noise, which is the fundamental limit of a high-resolution accelerometer. The theoretical model for the contrast ratio of a micro-grating accelerometer is established based on Gaussian beam theory, and the adjustment method based on a scanning slit beam profiler improves the contrast ratio of 0th order effectively. Compared to our former prototype, experiment results indicate the noise floor is decreased from 0.9 mg/root Hz to 137 mg/root Hz, and the bias stability is decreased from 0.35 mg to 3.1 mu g. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement