A built-in displacement sensor for an electrostatic film motor
A built-in displacement sensor for an electrostatic film motor
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DOI：
10.1088/0957-0233/17/10/020
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发表时间：
2006-10
影响因子：
2.4
通讯作者：
T. Nishijima;A. Yamamoto;H. Yasui;T. Higuchi
中科院分区：
文献类型：
--
作者：
T. Nishijima;A. Yamamoto;H. Yasui;T. Higuchi
本文提出并评估了一种内置的位置传感器的静电电机称为双激励多相静电驱动器。内置传感器的工作原理与典型的电容式线性编码器相似。传感器系统将高频传感器信号叠加到低频驱动信号上，使得其可以与电机的驱动操作共享相同的电极。本文分析了基于电容网络模型的电机，使我们能够评估所提出的传感器系统的线性误差的传感器原理。该传感器在原型电机上实现，以评估其性能。实验结果表明，该传感器可以通过与驱动操作共享相同的电极成功地工作。当不施加驱动信号时，发现线性误差为24 µm。当施加驱动信号时，发现线性误差增加到48 µm。
This paper proposes and evaluates a built-in position sensor for an electrostatic motor called a dual excitation multiphase electrostatic drive. The built-in sensor operates on a similar principle to typical capacitance-type linear encoders. The sensor system superimposes a high-frequency sensor signal onto a low-frequency driving signal so that it can share the same electrodes with driving operation of the motor. This paper analyses the sensor principle based on a capacitance network model of the motor that allows us to evaluate the linearity error of the proposed sensor system. The sensor was implemented on a prototype motor to evaluate its performance. The experimental results confirmed that the sensor can work successfully by sharing the same electrodes with the driving operation. The linearity error was found to be 24 µm when no driving signal was applied. As the driving signal was applied, the linearity error was found to increase up to 48 µm.