Optical and electrochemical dual-image CMOS sensor for on-chip biomolecular sensing applications

Optical and electrochemical dual-image CMOS sensor for on-chip biomolecular sensing applications
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DOI:
10.1016/j.sna.2006.08.027
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发表时间:
2007-04
影响因子:
4.6
通讯作者:
T. Tokuda;Kunihiro Tanaka;Masamichi Matsuo;K. Kagawa;M. Nunoshita;J. Ohta
T. Tokuda;Kunihiro Tanaka;Masamichi Matsuo;K. Kagawa;M. Nunoshita;J. Ohta
中科院分区:
工程技术3区
文献类型:
--
作者:
T. Tokuda;Kunihiro Tanaka;Masamichi Matsuo;K. Kagawa;M. Nunoshita;J. Ohta

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设计并制作了一种可以感知光学图像和二维阵列电化学轮廓的CMOS图像传感器。传感器的目标应用包括生物分子微阵列技术。将8×8像素阵列电化学传感器成功地实现在128×128像素的APS CMOS型图像传感器中。采用电流型电压跟随器作为电化学测量的列放大单元。8个列放大单元逐个连接到每列中的电化学传感像素,它们起到片上恒电位器的作用。该传感器可以在片上配置中测量2D阵列伏安法。对制作的传感器的基本性能和功能进行了表征。证实了光学和电化学成像功能可以同时独立运行。电化学测量功能的电流范围约为10nA和100μA,并成功地实现了二维阵列循环伏安测量。
A CMOS image sensor, which can sense optical images and 2D arrayed electrochemical profiles, was designed and fabricated. Target applications of the sensor include biomolecular microarray technology. An 8×8-pixel arrayed electrochemical sensor was successfully implemented into a 128×128-pixel APS CMOS image sensor. A current-sensing voltage follower was used as the column amplifier unit for electrochemical measurements. Eight column amplifier units were connected to electrochemical sensing pixels in each column one by one, and they function as on-chip potentiostats. The sensor can measure 2D arrayed voltammetry in an on-chip configuration. The basic properties and functions of the fabricated sensor were characterized. It was confirmed that optical and electrochemical imaging functions can be operated simultaneously and independently. The current range of the electrochemical measurement function was measured to be approximately 10nA and 100μA. A 2D arrayed cyclic voltammetry measurement was successfully demonstrated.