Niobium-Containing DLC Coatings on Various Substrates for Strain Gauges
Niobium-Containing DLC Coatings on Various Substrates for Strain Gauges
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DOI：
10.3390/coatings9070417
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发表时间：
2019-06
期刊：
影响因子：
3.4
通讯作者：
M. Grein;J. Gerstenberg;Chresten von der Heide;R. Bandorf;G. Bräuer;A. Dietzel
中科院分区：
文献类型：
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作者：
M. Grein;J. Gerstenberg;Chresten von der Heide;R. Bandorf;G. Bräuer;A. Dietzel
采用等离子体增强化学气相沉积（PECVD）和直流磁控溅射（DCMS）相结合的方法，在氩气/乙炔气氛中，在工业聚酰亚胺、旋涂聚酰亚胺和氧化铝衬底上制备了含铌类金刚石薄膜（a-C：H：Nb）。虽然工业箔上的涂层倾向于破裂，但旋涂的聚酰亚胺和陶瓷基板上的薄膜显示出良好的粘附性，以及光滑致密的形貌。对电性能的研究表明，它们适合作为应变计中的生物相容性传感器材料，应变系数高达3.2，电阻温度系数（TCR）为−200 ppm/K。
Niobium-containing diamond-like carbon films (a-C:H:Nb) were deposited in a hybrid plasma-enhanced chemical vapor deposition (PECVD) and direct-current magnetron sputtering (DCMS) process, using a niobium target in an argon/acetylene atmosphere on industrial polyimide foil, spin-coated polyimide foil, and alumina substrates. While the coating on the industrial foil tends to crack, the thin films on the spin-coated polyimide and the ceramic substrates showed good adhesion, as well as a smooth and dense topography. Investigations of the electrical properties revealed their suitability as biocompatible sensor materials in strain gauges, with a gauge factor of up to 3.2 and a temperature coefficient of the electrical resistance (TCR) of −200 ppm/K.