Dynamics of polymer film formation during spin coating
Dynamics of polymer film formation during spin coating
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DOI：
10.1063/1.4896674
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发表时间：
2014-09-28
影响因子：
3.2
通讯作者：
Geoghegan, M.
中科院分区：
文献类型：
--
作者：
Mouhamad, Y.;Mokarian-Tabari, P.;Geoghegan, M.
解释聚合物溶液自旋涂层的标准模型通常无法描述成膜的早期阶段，此时流体动力控制着溶液的行为。利用原位光散射以及理论和半经验模型，表明惯性力（最初引起膜内径向溶剂速度的垂直梯度）在溶液稀释率中起重要作用。将无溶质液体（甲苯）和由甲苯浇铸而成的聚苯乙烯和聚甲基丙烯酸甲酯共混物的厚度随时间的变化规律拟合到不同的模型中，以甲苯分压为函数。在聚合物共混膜形成的情况下，使用浓度依赖（哈金斯）粘度公式来解释自旋涂层过程中粘度的变化。介绍了一种半经验模型，该模型可以计算溶剂蒸发速率、溶质体积分数和溶液粘度的时间演变。(C) 2014作者。
Standard models explaining the spin coating of polymer solutions generally fail to describe the early stages of film formation, when hydrodynamic forces control the solution behavior. Using in situ light scattering alongside theoretical and semi-empirical models, it is shown that inertial forces (which initially cause a vertical gradient in the radial solvent velocity within the film) play a significant role in the rate of thinning of the solution. The development of thickness as a function of time of a solute-free liquid (toluene) and a blend of polystyrene and poly(methyl methacrylate) cast from toluene were fitted to different models as a function of toluene partial pressure. In the case of the formation of the polymer blend film, a concentration-dependent (Huggins) viscosity formula was used to account for changes in viscosity during spin coating. A semi-empirical model is introduced, which permits calculation of the solvent evaporation rate and the temporal evolution of the solute volume fraction and solution viscosity. (C) 2014 Author(s).