SCATTERING-MATRIX APPROACH TO MULTILAYER DIFFRACTION
SCATTERING-MATRIX APPROACH TO MULTILAYER DIFFRACTION
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DOI：
10.1364/josaa.12.001097
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发表时间：
1995-05-01
影响因子：
1.9
通讯作者：
SAMBLES, JR
中科院分区：
文献类型：
--
作者：
COTTER, NPK;PREIST, TW;SAMBLES, JR
描述了一种新的建模系统，用于确定多层结构的光学响应函数，该多层结构在层平面上具有周期性，即多层衍射光栅。这个新模型有两个基本要素。该模型基于 Chandezon 等人开发的完善的坐标转换程序。 [J。选择。秒。是。 72, 839-846 (1982)]，其中周期性调制的表面被转换为平坦的框架，从而允许更简单地使用麦克斯韦边界条件。然后，我们开发了一种散射矩阵技术，而不是使用传统的传递矩阵方法，该技术允许对具有许多场分量的非常厚（1μm或更大的量级）多层系统进行建模，而不会出现数值不稳定。模型程序是基于这种新的散射矩阵方法开发的，并通过与其他模型和实验数据的比较进行了测试。
A new modeling system to determine the optical response function of a multilayer structure with imposed periodicity in the plane of the layers, a multilayer diffraction grating, is described. This new model has two essential ingredients. This model is based on the well-established coordinate transformation procedure developed by Chandezon et al. [J. Opt. Sec. Am. 72, 839-846 (1982)] in which a periodically modulated surface is transformed into a frame in which it is flat, permitting simpler use of Maxwell's boundary conditions. Then, instead of using the conventional transfer-matrix method, we developed a scattering-matrix technique that permits the modeling of very thick (of the order of 1 mu m or greater) multilayer systems with many field components without numerical instability. Model programs have been developed based on this new scattering-matrix approach and tested by comparison with other models and experimental data.